TMC introduces SEM-Base® VI, the next generation of its STACIS® active piezoelectric vibration cancellation product line.
Like the original SEM-Base system, SEM-Base VI is designed to support all commercial scanning electron microscopes (SEMs). It features improved vibration isolation performance and a faster and more-robust controller that provides the user with an advanced graphical user interface (GUI).
“More and more, electron microscopes and focused ion beam (FIB) tools are installed in areas that do not meet the ever-increasing demands of these high-resolution instruments,” states Wes Wigglesworth, Product Manager, Active Systems at TMC. “SEM-Base VI provides, on average, 6dB improved vibration isolation performance over previous models, depending on the frequency and direction of the input.” “That gives facility managers even more flexibility when installing the instrument. And, TMC’s next generation controller—the DC-2020— features a new dual-core processor and provides tool owners and researchers with a very simple and easy-to-use graphical interface for fast system assessment and operational peace-of-mind,” he adds.
When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user’s browser with no additional software or application program to install. Alternatively, the user can interface with the controller via an on-board menu-driven liquid crystal display.
SEM-Base has provided SEM users and facility managers with superior vibration isolation starting at sub-Hz levels. The new SEM-Base VI incorporates improved processing speed and user interface, particularly for point-of-use applications, while providing enhanced isolation of low-frequency building floor vibration.
SEM-Base uses piezoelectric actuators and low-frequency inertial sensors to cancel lowfrequency floor vibration in real time. It is compatible with all internal tool vibration isolation systems, allowing older and less-than-optimal floors to accommodate vibration-sensitive instruments.