A fully-automated, 48-pin parametric test system is designed for wafer-level testing of power semiconductor devices and structures up to 3kV. Optimized for use with the latest compound power semiconductor materials including silicon carbide (SiC) and gallium nitride (GaN), the fully integrated Keithley S540 Power Semiconductor Test System is said to perform all high-voltage, low-voltage, and capacitance tests in a single probe touch-down.
The S540 lowers cost of wafer-level testing by minimizing test time, test set-up time, and floor space while providing lab-grade high voltage measurement performance. To deliver production-level performance, the S540 can perform parametric measurements on up to 48 pins without changing cables or probe card infrastructure. It can also perform transistor capacitance measurements such as Ciss, Coss, and Crss up to 3 kV, again without manual reconfiguration of test pins.
Further boosting test output, the S540 offers sub-picoamp measurement performance and can perform fully automated, high-voltage leakage current tests in less than one second.
As a standard commercial product, the S540 offers fully traceable system specifications, safety compliance, diagnostics, and worldwide service and support, features that are often missing in home-built or custom systems. The S540 draws on Keithley’s 30+ years of semiconductor parametric testing expertise and safely and seamlessly integrates industry-leading semiconductor test instrumentation with both low- and high-voltage switching matrices, cabling, probe card adapters, prober drivers, and test software.
The Keithley S540 is available for delivery beginning in March, 2017. More info: http://www.tek.com/keithley-s540-parametric-test-system